LASER TEMPERATURE MEASURING METHOD AND DEVICE USING COHERENT ANTI-STOKES RAMAN SPECTROMETRY

摘要

PROBLEM TO BE SOLVED: To improve the reproducibility and reduce an error by overlappingly radiating two laser beams selected from among rotating lines of specific chemical species having different wavelengths, and measuring the temperature of a body to be measured based on the intensity values of the first signal light and the second signal light generated by an interaction. ;SOLUTION: The laser beam emitted from a YAG laser 1 and reflected by a half-mirror 5 and the first and second laser beams L1, L2 emitted from the first laser light source 2 excite N₂ molecules via an interaction in a measurement region R, N₂ molecules are resonated and scattered, the first and second laser beams L1, L2 are overlapped, the first signal light S1 is received by a detector 15, and its intensity is measured. The third and fourth laser beams L3, L4 are likewise overlapped, the second signal light S2 is received by a detector 28, and its intensity is measured. The measured temperature is corrected in response to the changes in intensity of the first and second laser beams L1, L2 and the third and fourth laser beams L3, L4 in the calculation stage of the measured temperature.;COPYRIGHT: (C)1998,JPO