INSPECTION METHOD OF MIXED FOREIGN MATTER IN VESSEL AND INSPECTION EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To surely detect with high precision whether mixed foreign matter exists in a vessel, by transmitting only the polarized light from solid foreign matter in liquid, with a detection element disposed between a vessel filled with liquid and a camera, and photographing the transmitted light. ;SOLUTION: A light detection element (polarizing filter) 9 having a polarizing angle different from that of a polarizer 7 is arranged between a vessel G and a camera 5. The polarizing angle of the element 7 is so adjusted that the light which has permeated air bubbles and is polarized in not transmitted. Vessels G which are filled with liquid and closed are held by vessel retainers 3 of a turn table 1 are revolved by a rotating means, and the liquid in the vessels G is turned into the stirred state. The vessels G is irradiated with the light from a light source 6, via the polarizer 7 and a condenser lens 8. The detection element 9 filters only the refracted light which has passed to foreign matter in the liquid, so that the filtered light is photographed by a camera 5 and the foreign matter is detected.;COPYRIGHT: (C)1998,JPO