LATTICE DISTORTION EVALUATION METHOD USING CONVERGENCE ELECTRON BEAM DIFFRACTION GRAPHIC PATTERN AND EVALUATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To obtain information of crystalline lattice distortion over a wide range within short time using a convergence electron beam diffraction graphic pattern and enable that information to be visualized. ;SOLUTION: A lens system control unit is connected to an electronic microscope 1, thereby a convergence electron beam 9 is scanned in an arbitrary region of a sample 11. Thereby, convergence electron beam diffraction graphic patterns can be obtained continuously in an electron beam scanning region. By these convergence electron beam diffraction graphic patterns, a processing unit 6 discriminates and calculates a segment ratio between a user specified arbitrary HOLZ line cross points. This value and a coordinate on a sample are coordinated each other, colordiscriminated, or displayed on a contour line shape, and displayed on a display device 5.;COPYRIGHT: (C)1998,JPO