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METHOD AND DEVICE FOR GENERATING ARBITRARY FUNCTION AND DIGITAL CONVERGENCE CORRECTING DEVICE USING THEM
METHOD AND DEVICE FOR GENERATING ARBITRARY FUNCTION AND DIGITAL CONVERGENCE CORRECTING DEVICE USING THEM
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机译:使用它们生成任意函数和数字收敛校正设备的方法和设备
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摘要
PROBLEM TO BE SOLVED: To perform an interpolation operation on the convergence correcting value corresponding to an arbitrary scanning position at a high speed. ;SOLUTION: A manual adjusting means 11 which sets a manual adjusting value Dij to an adjusting point Aij and an arbitrary function generating device 20 which performs a interpolation operation on convergence correction data D based on a plurality of sets of adjusting data (Aij and Dij) are provided. The device 20 is provided with a storing means 21 which stores the adjusting data (Aij and Dij), a first arithmetic means 22 which decides an interpolation expression composed of quadratic expression by using the Newton's forward interpolation method, a second arithmetic means 23 which develops the interpolation expression by using the Runge-Kutta quadratic equation, and a storing means 24 and outputs the convergence correction value D synchronously to a scanning position P(x, y).;COPYRIGHT: (C)1998,JPO
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机译:解决的问题:以高速对与任意扫描位置相对应的会聚校正值执行插值运算。 ;解决方案:手动调整装置11和任意函数生成装置20,手动调整装置11将手动调整值D ij Sub>设置到调整点A ij Sub>。提供基于多组调整数据(A ij Sub>和D ij Sub>)的校正数据D。装置20设置有存储调节数据(A ij Sub>和D ij Sub>)的存储装置21,第一运算装置22确定由二次方构成的插值表达式通过使用牛顿正向插值法的表达式,第二运算装置23通过使用Runge-Kutta二次方程式来开发插值表达式,以及存储装置24,并且将会聚校正值D同步输出到扫描位置P(x,y) );版权:(C)1998,日本特许厅
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