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METHOD FOR PRODUCING DEPOSIT ON SEPARABLE BASE AND DEPOSIT PRODUCED ON THIS BASE
METHOD FOR PRODUCING DEPOSIT ON SEPARABLE BASE AND DEPOSIT PRODUCED ON THIS BASE
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机译:在可分离的基准上产生存款的方法和在该基准上产生的存款。
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摘要
PROBLEM TO BE SOLVED: To solve the problem that the reuse of a substrate having conductor parts is heretofore not possible in production of chips for electronic circuits, etc., by electrochemically deposited deposits. ;SOLUTION: A base of a conductor 6 or insulator is laminated on a substrate 2 having conductor parts for connection and in the case of the insulative base, the base in the upper part of the conductor parts is provided with apertures by etching, etc. The conductor is filled in these apertures and is thereby conducted to the conductor parts 4 of the substrate and the deposits 8 are electrochemically deposited on the base of the conductor 6 or the insulator, by which discrete or integrated chips are constituted on the base. The substrate 2 and the base having the deposits 8 are thereafter separated, by which the chips on the base and the substrate 2 are separated and the substrate 2 is made reusable.;COPYRIGHT: (C)1998,JPO
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