HIGH-TEMPERATURE SSNS AND SNS JOSEPHSON JUNCTION AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a high-temperature superconducting Josephson junction which is capable of overcoming electric resistance troubles that occur at an interface between a base electrode and a usual barrier layer. ;SOLUTION: A junction 40 is equipped with a first superconducting layer 46 of high To on a base 42 and a dielectric layer 48 formed on the superconductive layer 46, and a sloping edge face 50 is formed of the superconductive layer 46 and the dielectric layer 48. A three-layered SNS (high- temperature supercondcutor-normal conductor-superconductor) structure 52 is arranged on the sloping edge face 50 to form a SSNS junction. The SNS structure 52 is equipped with a second superconducting layer of high To provided direct onto the first superconducting layer 46, a normal barrier layer 56, and a third superconducting layer 58 of high Tc. The sloping edge face is usually formed through photoresist masking and ion milling, a plasma etching process is carried out in situ, and a photoresist layer is removed. After plasma etching is carried out, an NS structure is formed direct on the sloping edge face, whereby an SNS junction 70 can be formed.;COPYRIGHT: (C)1998,JPO