The pressure additive attributes attaching standard chamber type secondary pressure regulator and the differential pressure generator which uses that, reaction evaluation device

摘要

PURPOSE: To precisely generate an extremely small differential pressure and to stably send in an extremely small amount of gas and liquid by providing a coupling mechanism, which couples a back pressure chamber where secondary pressure is applied and a valve rod, with a motion converting mechanism which converts the rotary displacement of a spindle into linear displacement and a spring which couples this motion converting mechanism with the valve rod. ;CONSTITUTION: The back pressure chamber 38 is linked with a secondary passage 31 through a back pressure chamber side passage 34. A piston 36 is fixed to the valve rod 43. The back pressure side base end part 46 of the piston 36 is coupled with the spindle 51 through the motion converting mechanism 47 and spring 48. While the valve 42 is closed, a handle 57 is rotated to slightly move the spindle 51 back, and the valve 41 is slightly opened. Consequently, pressurized liquid is supplied from a primary passage 28 to slightly raise the pressure in the secondary passage 31, and differential pressure is generated between the passage and a reference chamber type primary pressure controller at the entrance side of the reaction evaluating device, so that the pressurized liquid flows to the reaction evaluating device by this differential pressure. Consequently, an extremely small flow rate is secured.;COPYRIGHT: (C)1993,JPO&Japio