PURPOSE: To reduce the hunting width of the temperature by setting the deviation coefficient and the velocity coefficient in an area where an object temperature is lower than a target temperature and the object temperature rises smaller than the ones in the other areas. ;CONSTITUTION: Temperature deviation is defined as an X axis, the fluctuation velocity of the temperature is defined as a Y axis and a coordinate value in an X-Y plane 21 is obtained. The coordinate value indicates one of the squares of a loop-up table and a value inside the square corresponding to the coordinate value becomes a fuzzy inference value. The fuzzy inference value obtained in such a manner is used as the output value of a velocity type and the value of output control is calculated corresponding to the output value and supplied to a heating/cooling means. The area 12 where the object temperature is lower than the target temperature and the object temperature rises is defined as a first area and inside the area, the deviation coefficient and the velocity coefficient are set to be smaller compared with the ones in the other areas 11, 13 and 14. Thus, the hunting width of the temperature can be reduced.;COPYRIGHT: (C)1995,JPO
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