首页> 外国专利> Production manner null of the x-ray hardening resist and the said x-ray hardening resist which make the pouring into a mold resin and the said pouring into a mold resin harden for the positive die x-ray hardening resist with

Production manner null of the x-ray hardening resist and the said x-ray hardening resist which make the pouring into a mold resin and the said pouring into a mold resin harden for the positive die x-ray hardening resist with

机译:正型X射线固化型抗蚀剂的制造方法,是将用于注入模具树脂的X射线固化型抗蚀剂和用于注入模具树脂的所述X射线固化型抗蚀剂的制造方法无效。

摘要

A casting resin composed of 65 to 95 % by weight methylmethacrylate (MMA) with a dissolved solids content from 5 to 35 % by weight polymethylmethacrylate (PMMA), with at least 30000 molecular weight and a weight average Mw which does not exceed 1.3 . 106, is used to produce a positive radiographic resist. A process is also disclosed for producing a radiographic resist, according to which a concentration of 0.2 to 0.4 % by weight azodiisobutyric acid dinitrile (AIBN) is used as initiator and a concentration of less than 0.1 % by weight mercaptane or a non-aromatic mercaptane derivate is used as regulator. The use of said casting resin and this production process allow radiographic resists to be obtained having improved microstructures after exposure to radiation and development.
机译:一种由65-95重量%的甲基丙烯酸甲酯(MMA)组成的浇铸树脂,其固形物含量为5-35重量%的聚甲基丙烯酸甲酯(PMMA),分子量至少为30000,重均Mw不超过1.3。 106,用于产生正性射线照相抗蚀剂。还公开了一种生产射线照相抗蚀剂的方法,根据该方法,将浓度为0.2至0.4重量%的偶氮二异丁酸二腈(AIBN)用作引发剂,并且浓度小于0.1重量%的硫醇或非芳族硫醇。导数用作调节器。所述流延树脂的使用和该生产方法允许获得在曝光和显影后具有改善的微结构的放射线照相抗蚀剂。

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