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Metallic phosphide composition for the production of phosphine use of a metallic phosphide and process for the manufacture of a metallic phosphide composition
Metallic phosphide composition for the production of phosphine use of a metallic phosphide and process for the manufacture of a metallic phosphide composition
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机译:用于金属膦的膦生产的金属磷化物组合物和金属磷化物组合物的制造方法
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摘要
A process and apparatus is disclosed for generating a mixture of phosphine and diluent gas(es). A hydrolysable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine and in a free-flowing particulate form, composed of loose metal phosphide particles. The generated mixture of phosphine and inert carrier gas, e.g. CO2, is used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation. Using argon as a carrier gas the phosphine mixture is suitable for semiconductor doping.
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