Miniature dynamically tunable microwave and millimeter wave device

摘要

A miniature, electrostatically actuated, variable impedance circuit element (10) is disclosed which is operably tunable in response to control signals. With integrated circuit, thin film processing a fixed circuit member (20) is fabricated on a substrate (12) and a movable circuit member (30) is fabricated over the substrate (12) and is movable relative to the fixed circuit member (20) in response to electrostatic fields. The electrostatic fields are produced at armature tabs (60, 62) when the control signals are selectively applied to rows of control electrodes (70-d, 72a-d). Embodiments include a variable capacitor (10) and a variable ring resonator.