Disclosed is a gas flow system of a gas bombay box that ensures no process failure in the event of a valve malfunction or minute leakage.;A gas bombay box, which is a semiconductor manufacturing equipment and an auxiliary equipment, further comprises a high pressure gas line discharge line for degassing and pressurizing a gas flow panel.;The gas bombay box is equipped with a check valve for high pressure to prevent back pressure.;The gas bombay box is equipped with a pressure sensor capable of detecting the pressure state of the high pressure (HP) Ar line.;The gas bombay box functions to be automatically vented upon conversion to pressure mode without using a vent line.;Therefore, according to the present invention, it is possible to obtain a gas flow system of a gas bombay box which can prevent the inflow of Ar into a real gas line by venting the high pressure (HP) Ar filled in the line after degassing or pressing.
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