Avoid V semiconductor process chamber diyong

摘要

The subject innovation was the problem that the semiconductor P V diyong relates to a process chamber, in the prior art, the process is proceeded to without checking the location teuleojim of the wafer is located in the interior of the process chamber, damage to the wafer. The invented semiconductor P V diyong process chamber each step cheombeo 14 install three or more position detecting sensor 16 for sensing the position of the wafer therein, a wafer to detect whether or not the position detection sensor 16 by detecting the position of teuleojim, there is an effect which prevents damage to the wafer by step to stop the progress of the wafer when the twisted position.