METHOD OF ANALYSIS OF MICROIMPURITIES OF SUBSTANCES IN GAS MIXTURES

摘要

FIELD: analysis of substances. SUBSTANCE: analyzed mixture is ionized with gas discharge of capacitive type and formed charged particles are registered. Discharge is excited by alternating high-frequency electric field in electrically isolated gas volume. Increased sensitivity of analysis, reduced limit of detection and enhanced dynamic range are obtained thanks to diminished level of noise and effective ionization volume. EFFECT: increased sensitivity of analysis, reduced limit of detection and enhanced dynamic range. 2 cl, 1 dwg