A process for the deposition of a ceramic coating of the vapor phase with the use of a water vapor-containing carrier gas and not - alkoxy - silane precursors

摘要

In order to reduce the rate of coke formation during the industrial pyrolysis of hydrocarbons, the interior surface of a reactor is coated with a uniform layer of a ceramic material, the layer being deposited by thermal decomposition of a non-alkoxylated organosilicon precursor in the vapor phase, in a steam containing gas atmosphere in order to form oxide ceramics.