首页> 外国专利> Hard-film stabilized soft-film biased magnetoresistive sensor with an alumina under layer pattern for improved longitudinal servo- positioning linearity and stability

Hard-film stabilized soft-film biased magnetoresistive sensor with an alumina under layer pattern for improved longitudinal servo- positioning linearity and stability

机译:具有氧化铝下层图案的硬膜稳定软膜偏置磁阻传感器,可改善纵向伺服定位的线性度和稳定性

摘要

A magnetoresistive sensor design and fabrication process that provides improved microtrack profile linearity for servo elements while simultaneously providing stable and linear data sensing elements suitable for high density tape head applications. The stability and uniformity of both data and servo sensor elements is enhanced through the use of a grating profile under both the soft film biased magnetoresistive sensor layer and the hard bias stabilizing magnets. Processing steps are eliminated by replicating the grating pattern for the servo sensor elements through a thick layer of alumina or silicon dioxide. The outer read shield is removed from the servo elements using a stripping process that eliminates structural damage arising from alumina pinholes. Both element types are free of significant Barkhausen noise and instability because of the grating-stabilized domains in both the active magnetoresistive regions and the passive hard-biasing regions of each sensor. Each servo sensor is disposed at a greater distance from the single shield to optimize the microtrack profile. The resulting reduction in servo sensor frequency response leaves sufficient bandwidth for precise servo positioning.
机译:磁阻传感器的设计和制造过程可为伺服元件提供改善的微径轮廓线性度,同时提供适用于高密度磁带头应用的稳定且线性的数据感应元件。通过在软膜偏置磁阻传感器层和硬偏置稳定磁体下方使用光栅轮廓,可以提高数据传感器和伺服传感器元件的稳定性和均匀性。通过厚的氧化铝或二氧化硅层复制伺服传感器元件的光栅图案,可以省去加工步骤。使用剥离工艺从伺服元件上卸下外部读取屏蔽,可消除氧化铝针孔引起的结构损坏。由于每个传感器的有源磁阻区域和无源硬偏置区域中的光栅稳定域,这两种元件类型都没有明显的巴克豪森噪声和不稳定性。每个伺服传感器都与单个屏蔽罩之间的距离更大,以优化微轨迹轮廓。由此导致的伺服传感器频率响应的降低为精确的伺服定位留出了足够的带宽。

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