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High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition
High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition
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机译:用于高生产率物理气相沉积的高磁通量永磁体阵列设备和方法
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摘要
A high magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition includes a magnetron array with a plurality of magnet assemblies disposed proximate to a target. Each assembly comprises a first portion magnetized perpendicularly to the target, a second portion magnetized perpendicularly to the target and opposite the first portion, and a third portion positioned intermediate the first and second portions, the third portion magnetized parallel to the target.
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