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Method of making a spacer based antifuse structure for low capacitance and high reliability
Method of making a spacer based antifuse structure for low capacitance and high reliability
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机译:用于低电容和高可靠性的基于间隔物的反熔丝结构的制造方法
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摘要
The present antifuse includes a base having a first electrode thereon which defines a top surface and a side surface. Antifuse material is disposed on the first electrode on at least a portion of the top surface and at least a portion of the side surface, with a second electrode on the antifuse material. Due to this configuration, defect problems in etching oxide as part of the antifuse structure are avoided, and meanwhile capacitance of the device is very low.
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