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Intracavity quantum well photodetector integrated within a vertical- cavity surface-emitting laser and method of operating same
Intracavity quantum well photodetector integrated within a vertical- cavity surface-emitting laser and method of operating same
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机译:集成在垂直腔面发射激光器中的腔内量子阱光电探测器及其操作方法
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摘要
A vertical-cavity surface emitting laser is constructed with an intracavity quantum well photodetector. The quantum well photodetector is placed at an optical intensity peak at the Fabry-Perot wavelength. The device may include a current confinement layer in the form of an oxidation layer, an air gap, or proton implantation. The device may be formed with a semi-insulating substrate, a p+ doped substrate, or an n+ doped substrate. Embodiments of the invention include an air bridge contact, a ridge waveguide structure, and buried heterostructure layers.
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