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Apparatus and method for coordinating the movements of stages in a multi- stage multi-rate positioner system
Apparatus and method for coordinating the movements of stages in a multi- stage multi-rate positioner system
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机译:用于协调多级多速率定位器系统中各级运动的装置和方法
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摘要
A multi-rate positioner system (50) receives unpanelized positioning commands from a database subsystem (64), profiles the commands (72) into a half-sine positioning signal, and further processes the signal into a low-frequency positioning signal (LFP) and a high- frequency positioning signal (HFP) for actuating respective slow (56, 58) and fast (54) positioners to target locations on a workpiece (62). The slow and fast positioners move without necessarily stopping in response to a stream of positioning command data while coordinating their individually moving positions to produce temporarily stationary tool positions (140) over target locations defined by the database. The multi- rate positioning system reduces the fast positioner movement range requirement while providing significantly increased tool processing throughput.
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