Method and system for triangulation-based, 3-D imaging utilizing an angled scanning beam of radiant energy

摘要

A method and system for three-dimensional imaging of objects, including integrated circuit interconnections and many other microelectronic assemblies and miniature parts, is used to greatly improve the efficiency of triangulation-based laser line scanning systems. A scanning beam is incident at a normal angle to the X,Y inspection plane with the scan line oriented at 45, diagonal to an axis defining a first direction of motion. Motion of the imaging head along the axis is used to acquire line scan images in the non-orthogonal coordinate system having symmetry about the orthogonal axes of motion.