STATISTICALLY CALCULATING METHOD BY USING RANDOM NUMBER AND MEASURING METHOD OF CONCENTRATION DISTRIBUTION BY USING THE METHOD

摘要

PROBLEM TO BE SOLVED: To remove errors from the results of measurement containing a theoretical measurement error factor attributed to a measuring method by inversely convoluting and integrating an actual measured value with the results of calculation obtained employing a method of statistic calculation using a random number. ;SOLUTION: An actual measurement is performed and the composition of an object to be measured, the type of a primary beam, an angle of incidence, incident energy and the like are recorded. The results of the measurement of a concentration distribution are stored into a file fl as a function C_sims (x) of the depth direction (x). Then, a simulation is performed to reproduce a measurement on a calculator for a structure in which elements to be measured are distributed in a manner of a delta function. The number of secondary ions or particles released for a certain period of time during which a primary beam is irradiated is calculated by a method of a systematic calculation using an interatomic potential, a formula of an energy loss in a solid and a random number with respect to an assumed delta function distribution of impurities to be measured. The results and an actual measured value are inversely convoluted and integrated to obtain a distribution of concentration.;COPYRIGHT: (C)1999,JPO