SUBSTRATE FOR ELECTRONIC MATERIAL EXCELLENT IN INSULATING PROPERTY AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To provide a flexible substrate for an electronic material to be hardly broken, capable of making it lighter than a glass substrate and excellent in insulating property and the production method. ;SOLUTION: In a substrate for an electronic material consisting of a base and a surface insulating layer, the surface insulating layer is formed by ≥1 kind of metal oxide and a nonconductive material other than the oxide. Al oxide, Ti oxide, Zr oxide, Mg oxide, Si oxide, Sn oxide, etc., are exemplified as the metal oxide and the Al oxide is preferably used among them. The oxide, nitride, hydroxide or oxyhydroxide of ≥1 kind of an element selected from a group consisting of Al, Si, Ti, Zr, Li, Mg, Sn and Zn are exemplified as the nonconductive oxide and in this case, a soln. in which a compd. having an Si-O bond is dissolved, is applied to the surface of an anodically oxidized film 2 and baked to form a surface insulating layer contg. the Si oxide.;COPYRIGHT: (C)1999,JPO