HARTMANN TYPE OPTICAL WAVE FRONT SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a wave front sensor and a measurement method for two- dimensionally measuring the partial phase inclination over the section of a beam by using the sole small lens array and a sensor array of the sole camera. SOLUTION: A rectangular lens array is directed at an angle of 45 deg. to the perpendicular first and second sets of axes for drawing a plurality of subject points 22' on the section of a beam. Whereby a sub-aperture of each small lens is centered on a point 40 between the adjacent subject points on the first and second axes. A sensor array of a camera comprises the cells per a unit area more than the sub-apertures per a unit area. Only the selected cells are activated to perform the measurement on an almost intermediate point of a line between the adjacent subject points 22' on the perpendicular first and second axes.