OPTICAL COMPONENT MANAGING SYSTEM FOR EXCIMER LASER AND METHOD FOR MANAGING THE SAME

摘要

PROBLEM TO BE SOLVED: To obtain a laser beam of an optical high quality level by calculating a composite wave front shape from individually measured wave front characteristics, and selecting an optimum combination of optical components based on the calculated shape. ;SOLUTION: Identification(ID) numbers are respectively set to individual optical components, and input from an optical component data input means 51. The component corresponding to the ID number is used as an object 8 to be measured, and, wave front characteristics of all the components are measured by a wave front characteristic measuring means 20, and the ID numbers and the wave front characteristics are stored in a data base memory means 52. The characteristics are added to each other along an optical path by a wave front shape calculating means 53, and a composite wave front shape is obtained as functions of X- and Y-axis. And, whether the shape falls within a predetermined allowable range or not is decided for all combinations of the incorporated components by an evaluating the deciding means 54. The components are optimally combined so as to obtain a maximum number of combination sets so that the wave front shape falls within the predetermined allowable range by an optimum combination setting means 55 based on the decided result, and stored by an optimum combination memory means 56. And, it is displayed on a combination display means 57 to inform an operator of how to combine the components.;COPYRIGHT: (C)1999,JPO