Stage mass selection deceleration (POST MASS SELECTION DECELERATION) type ion implantation apparatus

摘要

(57) deceleration lenses [Abstract] downstream mass selection deceleration type, is disposed between the inlet tube of the electron confinement in PFS and (55) the exit aperture of the mass selection chamber (47). A second electrode of the first electrode which is the potential of the substrate (65) has a potential of the flight tube, is relatively high (negative) voltage, the lens, the ion beam at the first electrode and a field electrode lead to convergence and (61). The first electrode is avoided that it is larger than the beam, toward the outside of the beam gives the ions deflected by the periphery of the opening. Become a -5kV at least the flight tube, ie, the field electrode, which is substantially larger than that required to suppress electrons. Additional openings are provided between the chamber and the mass selection process chamber, thereby improving the evacuation.