EMERGENCY STATE MANAGING METHOD FOR FACILITY IN SEMICONDUCTOR PRODUCTION FACILITY MANAGEMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To accurately grasp the emergency state of a facility in real time after online communication is recovered by deciding whether an alert state is a dangerous state when the facility is in an alert state, downloading to the facility and turning off the facility. ;SOLUTION: A host 1 is provided with an emergency state monitoring module 20 which monitors emergency state data that is uploaded from a facility 3 after online communication is recovered. Thus, the module 20 grasps an emergency state of the facility in real time after the online communication is recovered. In such a case, when it is decided that an alert state of the facility 3 is a dangerous state and that the facility is unstable, the module 20 communicates the results to the host 1, which cuts off process progress by the facility 3 completely when the host 1 changes the key value of a variable ID to an off state. That is, the facility 3 is turned off at once by downloading to the facility 3.;COPYRIGHT: (C)1999,JPO