首页> 外国专利> MAXIMUM THEORETICAL YIELD AUTOMATIC CALCULATING DEVICE AND COMPUTER READABLE RECORDING MEDIUM WITH PROGRAM FOR EXECUTING HAVING COMPUTER EXECUTE AUTOMATIC CALCULATION OF MAXIMUM THEORETICAL INPUT VOLUME STORED THEREIN

MAXIMUM THEORETICAL YIELD AUTOMATIC CALCULATING DEVICE AND COMPUTER READABLE RECORDING MEDIUM WITH PROGRAM FOR EXECUTING HAVING COMPUTER EXECUTE AUTOMATIC CALCULATION OF MAXIMUM THEORETICAL INPUT VOLUME STORED THEREIN

机译:最大理论产量自动计算装置和具有程序的计算机可读记录介质,用于执行其中存储的最大理论输入量的计算机执行自动计算

摘要

PROBLEM TO BE SOLVED: To enable a minimum exposure frequency in a maximum theoretical input volume, by having a minimum exposure frequency condition paging function and a minimum exposure frequency condition selecting function, and by having a decision arrangement diagram displaying function and an aligner entire parameters displaying function. SOLUTION: A minimum exposure deciding part 7 retrieves the conditions for minimum exposure frequency among exposure arrangement conditions which are calculated at an imaginary exposure arrangement calculating part 5, and are retrieved stored at an imaginary exposure arrangement memorizing part 6 by a minimum exposure frequency condition paging function 7a and are stored these. Also it has a minimum exposure frequency condition selecting function, which selects any of these in case exposure arrangement conditions which become minimum exposure frequency to have been paged and to have been memorized being plural. A decision arrangement displaying part 8 decides an arrangement diagram, in which a chip arrangement which becomes a maximum theoretical input volume selected and decided at the maximum theoretical input volume arrangement deciding part 4 and the minimum exposure arrangement decision part 7 and display these.
机译:解决的问题:通过具有最小曝光频率条件寻呼功能和最小曝光频率条件选择功能,并具有决策排列图显示功能和对准器整个参数,以在最大理论输入量中实现最小曝光频率显示功能。解决方案:最小曝光确定部分7检索在假想曝光布置计算部分5计算的曝光布置条件中的最小曝光频率条件,并通过最小曝光频率条件分页检索存储在假想曝光布置存储部分6中的条件。功能7a并存储这些。它还具有最小曝光频率条件选择功能,其在成为最小曝光频率的已被分页并被存储为多个的最小曝光频率的曝光布置条件中选择这些中的任何一个。决定配置显示部8决定配置图,其中,在最大理论输入量配置决定部4和最小曝光配置决定部7中选择并决定成为最大理论输入量的芯片配置,并进行显示。

著录项

  • 公开/公告号JPH11274053A

    专利类型

  • 公开/公告日1999-10-08

    原文格式PDF

  • 申请/专利权人 SONY CORP;

    申请/专利号JP19980078624

  • 发明设计人 SUZUKI KEISUKE;

    申请日1998-03-26

  • 分类号H01L21/027;G06F17/00;G06F17/10;

  • 国家 JP

  • 入库时间 2022-08-22 02:33:55

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