PROBLEM TO BE SOLVED: To provide a clean container for highly pure chemical that comply with finer VLSI by limiting the number of particles, the concentration of metal impurities and the chloride ion concentration to extremely low values. ;SOLUTION: A polyethylene resin having the following (1)-(5) properties is used: (1) the viscosity (JIS K6760-1981) is 0.935-0.97 g/cm3, (2) the melt flow rate at 190°C under a load of 21.6 kg (JIS K7210-1976, condition 7) is 2-100 g/10 minutes, (3) the ratio (Mw/Mn) of the weight-average molecular weight(Mw) measured by gel permeation chromatography(GPC) and the number-average molecular weight (Mn) is 1.5-5, (4) the ash content is 50 ppm or lower, (5) the chlorine content is 5 ppm or lower.;COPYRIGHT: (C)1999,JPO
展开▼
机译:要解决的问题:通过将颗粒数量,金属杂质浓度和氯离子浓度限制在极低的水平,为符合更高精细VLSI要求的高纯度化学品提供清洁的容器。 ;解决方案:使用具有以下(1)-(5)性质的聚乙烯树脂:(1)粘度(JIS K6760-1981)为0.935-0.97 g / cm 3 Sup>,(2) 190°C在21.6 kg的载荷下的熔体流动速率(JIS K7210-1976,条件7)为2-100 g / 10分钟,(3)重均分子量的比(Mw / Mn)( Mw)是通过凝胶渗透色谱法(GPC)测定的,数均分子量(Mn)为1.5〜5,(4)灰分为50ppm以下,(5)氯为5ppm以下。版权:(C)1999,日本特许厅
展开▼