Registration decision manner by the said decision manner the registration control unit

摘要

PURPOSE: To improve the throughput without deteriorating the accuracy of a positioning controller by considering that a moving object has moved to its target position when a state where the mean value and the maximum value of the difference between the position of the moving object and its target position are kept under each reference level lasts for a fixed period. ;CONSTITUTION: The difference between the present position and the target position of an XY stage 101 is sampled for a fixed period and the average value of the difference is obtained. Then the difference of the largest absolute value is obtained among those sampled differences between the present and target positions of the stage 101. When the mean absolute value is smaller than a reference level for decision, it is confirmed whether the absolute value of the largest difference is smaller than a reference level for decision or not. If so, the value of a built-in counter is counted up by one. A fact whether the value of the counter is equal to a decided level or not is confirmed in order to confirm whether a state where the mean value and the largest value of the difference between the measured position and the target position of a moving object are less than each prescribed level lasts for a fixed period or not.;COPYRIGHT: (C)1993,JPO&Japio