FAILURE ANALYSIS SUPPORTING DEVICE, FAILURE ANALYZING METHOD, AND STORAGE MEDIUM CAPABLE OF BEING READ BY COMPUTER

摘要

PROBLEM TO BE SOLVED: To provide a failure analysis supporting device, a failure analyzing method, and a storage medium capable of being read by a computer which can quantitatively-grasp failures occurring at production equipment and support analysis of possible causes of the failure. SOLUTION: A parameter which may be a possible cause of failure is read from a previously-stored data base (S1). An operator conducts the first analysis calculation with this device (S2). The information of a position which is estimated as a possible cause of failure based on the calculation results is selected, and the second analysis calculation is conducted based on necessary past record data (S3, S4). The operator draws up a definite plan for improvement based on the calculation results.