OPTICAL SYSTEM DISPLACEMENT SENSOR AND OPTICAL SYSTEM DISPLACEMENT MEASURING EQUIPMENT USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an optical system displacement sensor having high resolution and a wide measuring range, and an optical system displacement measuring equipment using the sensor. ;SOLUTION: In this equipment, the image of a light spot cast on an object 5 to be measured from a light source 1 is formed on a displacement sensor 2 by an imagery lens 4, and displacement of the object 5 is measured by using the position of the light spot image formed on the displacement sensor 2. In this case, the displacement sensor 2 has three or more photoelectric transducers which are adjacently arranged, and a signal processing part which adds specific offset to the difference signal of the two adjacent photoelectric transducers and performs adding process.;COPYRIGHT: (C)1999,JPO