SAMPLE WATER COLLECTING METHOD IN WATER EVALUATION OF WARM EXTRAPURE WATER

摘要

PROBLEM TO BE SOLVED: To substantially avoid the production of an eluent from a film mounting holder, a piping or the like by collecting a sample water after cooling once in the collection of warm extrapure water. ;SOLUTION: Warm extrapure water obtained by operating the heat hose of an extrapure water producing device is passed through a fluorine resin-made tube extended from a sampling point through a cooling water tank, and then passed through a fine particle catching filtration film in a fine particle catching film mounting position as a new sampling point. At this time, pure water cooled by a cooling circulating device as coolant cools the warm extrapure water from the outside of the tube in the cooling water tank. Thus, the warm extrapure water can be sufficiently cooled with water having ordinary temperatures only by extending the tube from the sampling point and cooling the circumference of the tube. When the warm extrapure water is lowered to a temperature close to the ordinary temperatures just before sampling, production of an eluent from a film mounting holder, a piping, the filtration film, and a sampling bolt by the heat of the warm extrapure water can be avoided.;COPYRIGHT: (C)1999,JPO