Glass substrate cassette with a slipping prevention mechanism

摘要

PURPOSE: To provide a substrate cassette which can reliably prevent a substrate from slipping down without interference to entry/removal of the substrate while a simple mechanism without movable parts is employed. CONSTITUTION: A lower face of a box-type cassette comprises a bottom frame 11 and an upper face comprises a ceiling frame 12, respectively, wherein a pair of opposite sides comprise side plates 2, 2 with groove having a structure with tongue-like shelves 22 extended from a back 21 toward inside of the cassette at predetermined pitches. A comb-like member 3 having comb teeth 3a having the same pitches as those of the shelves 22 of the side plates 2, 2 are placed on at least one, normally on both side rims of a substrate entrance of the cassette, so that each stage of the comb teeth 3a is slightly higher than each stage of the side plates 2, 2, and a free end direction of the comb teeth 3a is directed to close the entrance of the substrate.