METHOD AND DEVICE FOR MONITORING VIBRATING STATE OF ULTRASONIC WIRE-BONDING DEVICE

摘要

PROBLEM TO BE SOLVED: To avoid the connection defects of a fine metal wire to a part to be connected, in the case of ultrasonic wire bonding. SOLUTION: When there is abnormality in a vibration system, including an ultrasonic oscillation horn 2 or a capillary 1, an electric load for driving a vibrator 24 is increased and a current flowing through the vibrator 24 is decreased. A voltage to be impressed to the vibrator 24 or the current to flow through the vibrator 24 is monitored, and when this voltage or current exceeds a fixed level, abnormality at the ultrasonic oscillation horn 2 or the capillary 1 or the degree of abnormality is detected.