ARRAY BASED FOCUSING TYPE ELECTROMAGNETIC ULTRASONIC PROBE

摘要

PROBLEM TO BE SOLVED: To provide an electromagnetic ultrasonic probe which enables main directions of propagation of ultrasonic waves of individual electromagnetic ultrasonic probe elements to concentrate on one point. ;SOLUTION: This probe is made up of electromagnetic ultrasonic probe elements arranged in plurality. The electromagnetic ultrasonic probe elements a-d are each constituted of magnets 3a-3d each combined with a plurality of magnet segments and coils 2a-2d arranged to generate an eddy current in the surface of a specimen. The width of the magnetic segments composing each of the electromagnetic ultrasonic probe elements a-d is made smaller for the electromagnetic ultrasonic probe farther from the position of a target 20 of the specimen 4 while larger for the electromagnetic magnetic probe element nearer to it. This allows the concentration of main directions of propagating ultrasonic waves generated in the specimen 4 onto the target 20 of the specimen by the electromagnetic ultrasonic probe elements.;COPYRIGHT: (C)1998,JPO