EXTERNAL BURNING SYSTEM, EXTERNAL BURNING, PROCESSING SYSTEM WITH THE EXTERNAL BURNING SYSTEM AND PROCESSING USING THE EXTERNAL BURNING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an external burning system, an external burning method, a processing system and a processing method which are capable of controlling the temperature of an introduced gas, as being desired independently of an ignition temperature. ;SOLUTION: A vertical diffusion furnace 10 and an external burning system 50 are provided. In the furnace 10, a boat 16 is provided within a reaction tube 30 inside a heater 12, and wafers 20 are placed in the boat 16 in many layers. The system 50 has a burning tube 52, a connecting pipe 54, gas- introducing pipes 56 and 58, and heaters 62 and 64 that over the tube 52. Hydrogen gas and oxygen gas are respectively introduced from the pipes 56 and 58 and are burnt in the system 50 to produce vapor. The produced vapor is thereafter introduced into the tube 30 via the pipe 54 and a nozzle 32. The heaters covering the tube 52 are separated into the ignition heater 62 and the gas temperature control heater 64. The temperature of the heater 62 is set to igniting temperatures of hydrogen and oxygen or higher, and the temperature of the heater 64 is set appropriately so as to match the process conditions.;COPYRIGHT: (C)1999,JPO