Non-metallic inclusions inspection method and non-metallic inclusions inspection equipment

摘要

PURPOSE:To automate the setting of threshold values and to improve inspection efficiency by analyzing nonmetal enclosure based on binarized concentration data and concentration data stored in a memory means. CONSTITUTION:A sample 100 containing nonmetal enclosure is magnified and observed through a microscope 220 and converted into an image signal through a camera 230. Then, an image processing device 320 receives the image signal, performs the processing required for inspection and sequentially stores the concentration data into a memory. When it is judged that all picture elements are read out, the concentration hystogram indicating the distribution of the number of the picture elements is formed for every concentration in concentration arrangement. Then, the concentration peak value corresponding to the largest value in the concentration arrangement is obtained. The value obtained by subtracting a specified value from the concentration peak value is made to be a threshold value. The concentration data stored in a memory means are binarized in a binarization means. The enclosure is analyzed with a nonmetal-enclosure analyzing means 300 based on the concentration data and the concentration data in the memory means. Thus, the setting of the threshold values can be automated, the inspection efficiency is improved and the accurate inspection can be conducted.