METHODS FOR ESTIMATING APPLIED LOAD, FOR JUDGING LOAD OPERATION, AND MEASURING EDGE POSITION IN BONDING BY BONDER

摘要

PROBLEM TO BE SOLVED: To make it possible to monitor an impact load and a static applied load during wire bonding and detect, abnormality in load in a wire bonding unit. SOLUTION: In an estimating method for an applied load, a Z-axial current of a wire bonder is detected for each change in bonder-side setting load in a current measuring step. An applied load at a capillary top is measured for each change in a set load. The detected current in a current measuring step is passed through filters 11 and 12 to detect a peak current of the impact load and a current of the static load. Then, a relation between the peak current of the impact load and the applied load at the capillary top is detected for each change in bonder-side set load, and a relation between the current of the static load and the applied load at the capillary top is detected for each change in bonder-side set load.