SHARPENING OF EDGE OF MOLD AND DEVICE FOR SHARPENING EDGE OF MOLD

摘要

PROBLEM TO BE SOLVED: To sharpen the edges of the saw teeth of a mold for optical elements. ;SOLUTION: A mold 20 is loaded on the support 60 of a device 30 for sharpening the edges of the mold. The chamber 32 of the device 30 for sharpening the mold is provided with a plasma-producing chamber 36 and a processing chamber 44. Argon gas is ionized in the plasma-producing chamber 36 to generate argon ions. A grid-like electrostatic electrode 50 has many holes to guide the argon ions into the processing chamber 44. The argon ions are collided with the surface of the mold 20 to cut down the mold 20 only in a removal amount based on an ion incident angle, thus sharpening the edges of the saw teeth of the mold 20.;COPYRIGHT: (C)1999,JPO