Profile microstructure observation manner and observation device

摘要

PURPOSE:To make it possible to observe the cross section of fine structure in any arbitrary region of a sample. CONSTITUTION:A gas intake mechanism is additionally installed to a scanning type microscope so as to provide an etching performance by allowing a processed workpiece to adsorb active gas and emitting electron beam to the processed workpiece (electron beam excitation dry etching function). A sample to be observed is partially etched and eliminated by using this device so that the cross section may be exposed. Then, cross section observation in a fine region is carried out by tilting the sample. This construction makes it possible to observe the cross section in any fine region and to prepare a sample in the same vacuum tank continuously.