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The electronic line drawing picture device and the record media which makes electronic line drawing picture proximity effect amendment manner and that manner record

机译:电子画线图像装置及制作电子画线图像接近效果修正方式并以该方式记录的记录介质

摘要

Abstract Topic To make the data smoothing between the pixels unnecessary, at the same time precision highThe electronic line drawing picture manner which makes the amendment which is and is based on area density possibleIt offers. Solutions The computer 11 where the drawing data is storedWith, the graphic take-down department resolution the drawing data from of computer 11The proximity effect amendment section 13 amendment 12 and the drawing data and,Exposure sequence control section 14 and for deflection signal DAC15 and electronLine drawing picture device itself E and to consist of, with computer 11 the rectangular pasExposure per specified unit area which corresponds to the apex position of turnTo calculate area density, amendment the proximity effect in proximity effect amendment section 13Those which it does, tries amendment the exposure time of rectangular patternSo it is.
机译:<摘要> <主题>为了使像素之间的数据平滑变得不必要,同时又提高了精度可以提供基于面积密度的修正的电子线描图方式。解决方案存储绘图数据的计算机11,图形取下部门解析计算机11的绘图数据,邻近效应修正部分13修正12和绘图数据,以及曝光顺序控制部分14以及偏转信号DAC15和electronLine绘图设备E本身,并由计算机11组成的矩形pasExposure,对应于转弯顶点位置的每指定单位面积曝光为计算区域密度,请在接近效果修正部分13中修正接近效应。矩形图案的时间是这样。

著录项

  • 公开/公告号JP2885782B1

    专利类型

  • 公开/公告日1999-04-26

    原文格式PDF

  • 申请/专利权人 株式会社日立製作所;

    申请/专利号JP19980099654

  • 发明设计人 大櫃 憲三;

    申请日1998-04-10

  • 分类号H01L21/027;G03F7/20;

  • 国家 JP

  • 入库时间 2022-08-22 02:29:31

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