Was formed the steaming/evaporation film deposition formation device, with steaming/evaporation film deposition formation manner and these the substrate

摘要

PURPOSE:To form a vapor-deposited film in which the contour line of film thickness shows a specific shape by rotating a mask body provided between an evaporating source and a base plate around a rotary axial line of the direction different from the rotary axial line of the base plate. CONSTITUTION:The rotating mechanism 32 of base plates is constituted cf an inner cylindrical mask body 33, a rotor 34 and a gear 35 and the mask body 33 is fixed in a bell jar. A plurality of base plates 43 are set on the rotor 34 and a rotary mask body 44 is provided between the rotor 34 and an evaporating source 30. The cross section of this rotary mask body 44 is formed into a heart shape, etc., and the direction of the rotary shaft 45 thereof is allowed to differ from the direction of the rotary axial lines of the base plates. The rotary mask body 44 is rotated while being synchronized with the rotor 34. When the rotation of the mask body 44 is controlled so that aperture area of an aperture 39 is made large as the forward parts 43 in the direction of rotation of the base plates 43 cross the just above part of the evaporating source 30 and the aperture area of the aperture 39 is narrowed as the rear end parts in the direction of rotation approach the just above part of the evaporating source 30, the vapor-deposited films whose thickness is continuously changed can be manufactured on the base plates 43.