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The bismuth due to liquid phase epitaxial modulo amp; yttrium iron garnet crystal film rearing manner

机译:铋由于液相外延模钇钇铁石榴石晶体膜的养成方式

摘要

PURPOSE:To efficiently grow the title crystal film in a short time, by using a double crucible, equipping a circulation hole and a shutter between an outer crucible and an inner crucible, controlling an amount of solution in the outer crucible introduced and feeding the solution to the inner crucible with the progress of growth of crystal film in the inner crucible. CONSTITUTION:A double crucible consisting of an outer crucible 1 and an inner crucible 4 is prepared and a circulation hole 2 and a shutter 3 are set between the outer crucible 1 and the inner crucible 4. Then, a melt 5 for producing Bi-Y-Fe garnet crystal film is put in the inner crucible 4 and a melt 6 having a higher composition ratio of Bi and Y than of the melt 5 is fed to the outer crucible 1. Then, a substrate is immersed in the surface of melt 6 in the inner crucible 4 and the Bi-Y-Fe garnet crystal film is grown on the substrate by liquid phase epitaxial method. According to the growth of crystal film in the inner crucible 4, opening and closing time of the shutter 3 is controlled and the melt 6 in the outer crucible 1 is fed to the inner crucible 4 so as to make the composition of the melt 5 constant.
机译:目的:为了在短时间内有效地生长标题晶体膜,通过使用双坩埚,在外坩埚和内坩埚之间配备循环孔和百叶窗,控制引入的外坩埚中的溶液量并送入溶液随着内坩埚中晶体膜的生长,向内坩埚迁移。组成:准备一个由外坩埚1和内坩埚4组成的双坩埚,并在外坩埚1和内坩埚4之间设置一个循环孔2和一个闸板3。然后,制备Bi-Y的熔体5将-Fe石榴石晶体膜放入内坩埚4中,将Bi和Y的组成比高于熔体5的熔体6进料到外坩埚1中。然后,将基板浸入熔体6的表面中在内坩埚4中,通过液相外延法在衬底上生长Bi-Y-Fe石榴石晶体膜。根据内坩埚4中晶体膜的生长,控制闸门3的打开和关闭时间,并将外坩埚1中的熔体6进料到内坩埚4中,以使熔体5的成分恒定。

著录项

  • 公开/公告号JP2826869B2

    专利类型

  • 公开/公告日1998-11-18

    原文格式PDF

  • 申请/专利权人 TOOKIN KK;

    申请/专利号JP19890339355

  • 发明设计人 NAKAGAWA MANABU;

    申请日1989-12-26

  • 分类号C30B29/28;C30B19/06;

  • 国家 JP

  • 入库时间 2022-08-22 02:28:54

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