Process for driving excitation of vibrators for the capacitive measurement of force, acceleration and / or rotation rates

摘要

The present invention pertains to a method of capacitive stimulation of an oscillator control in sensors used for capacitive measurement of strengh, acceleration and especially rotation speed based on the Coriolis principle. In this method, the control is stimulated using high frequency pulse packs, free of continuous voltage and constant in amplitude, of which the width or phase angle relative to the stabilized oscillation speed is adjusted for the purpose of resetting to the initial state or correcting tolerances. Another embodiment of the inventive method allows, in case of electrode oscillators installed in pairs and symmetrically relative to the rotation axis, for high frequency voltages to be obtained that are identical and constant in amplitude. The frequency chosen for these voltages is clearly above the oscillator frequency, resulting in a certain attractive force acting upon the oscillator by shifting the mutual phase lag in the control voltages. In the case of rotation speed sensors the setting of which is based on the closed-loop principle, a resetting to the initial state may also be ensured. The invention also enables problems related to coupling the stimulating signal in the selector channel of a micromechanical oscillator system to be overcome.