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TARGET, MAGNETRON SOURCE WITH SAID TARGET, AND PROCESS FOR PRODUCING SAID TARGET
TARGET, MAGNETRON SOURCE WITH SAID TARGET, AND PROCESS FOR PRODUCING SAID TARGET
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机译:目标,具有所述目标的磁控源以及生产所述目标的过程
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摘要
When a ferromagnetic-material target (1) is used, themagnetron stray field is influencedselectively by provision of apattern of blind holes (3) in orderto counteract the effect of theferromagnetic material in theform of a magnetic short circuit.
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