Gas bearing turbo pump and gas bearing feedthrough

摘要

A process module includes a chamber housing that can be evacuated for processing a workpiece therein. A shaft (20a) penetrating the housing permits manipulation of the workpiece. A first gas bearing sleeve (26) having a vent groove (32) couples the shaft through the housing such that the shaft is rotatable and/or translatable. A turbo pump is also provided having a gas bearing sleeve coupled to the housing to facilitate rotation of the shaft (116) within the housing. A gas conduit (136) for coupling gas to the bearings, and a vent pathway (140) are provided.