Microwave power source apparatus for microwave oscillator comprising means for automatically adjusting transmitted wave power and control method therefor

摘要

In a microwave power source apparatus for a microwave oscillator for generating a microwave, a DC power source (1) supplies a DC power for generating the microwave to the microwave oscillator. A measuring section of a voltage standing wave detector (31) is mounted on a microwave transmission line (13) connected between the microwave oscillator (10) and a microwave load (30), and measures either one of an impedance seen looking toward the microwave load at a mounted point thereof or a reflection coefficient thereat by detecting a voltage standing wave of the microwave being generated by the microwave oscillator and propagating on the microwave transmission line. A controller (50) calculates a transmitted wave power of the microwave propagating on the microwave transmission line from the microwave oscillator toward the microwave load based on either one of the impedance and the reflection coefficient measures by the measuring section, and controls the DC power source to adjust the transmitted wave power of the microwave to a predetermined desirable adjustment value based on the calculated transmitted wave power.