COUPLING SYSTEM FOR THE TRANSFER OF A CONFINED PLANAR OBJECT FROM A CONTAINMENT POD TO AN OBJECT PROCESSING UNIT

摘要

A coupling system for the transfer of a confined planar object (12) from a containment enclosure (10) with a first sealing gate (16) to an object processing unit (20) with at least a second opening (28) for transferring the planar object is disclosed, said system including coupling means (30) for sealingly coupling the first and second openings (18, 28) and comprising a second sealing gate (36), and means for releasing said first and second sealing gates.