FEA controlled by integrated MOSFET and manufacturing method thereof

摘要

The present invention relates to an FEA that is controlled by an integrated MOsFET having a structure in which the cathode electrode and the FEA are indirectly interconnected by a MOSFET while being isolated from each other and is capable of controlling the FEA emission current by a MOSFET, The uniformity of the emission current is improved, the stable emission current can be obtained, and the additional process necessary for interconnecting the FEA and the MOSFET can be eliminated, thereby significantly reducing the manufacturing cost of the FED.